BusinessCompetency
ChemOptics supplies electronic materials for semiconductor and devices
for optical communication for future advanced industries.
We also provide foundry services to support R&D
and process validation for photonic semiconductor technologies.
Semiconductor Material
BARC polymer
BARC(Bottom Anti-Reflective Coating) for spin coating is a semiconductor material that can control distortion of PR patterns such as standing waves and notching generated by scattering of exposure sources from the lower surface and reflected light in semiconductor process.
BARC is used in the lower membrane of PR to minimize the performance loss of PR, enabling uniform patterns and precise circuits.
ChemOptics produces the best polymer for BARC based on more than 10 years of know-how.
Polyester type BARC Product Properties :
- Mw control : Target Mw < ± 150
- Residual Metals : < 3 ppb in solution
- Good reproducibility
- Size : 50L, 200L & 300L
Without BARC
With BARC
